Abstract:A seamless chip-to-world photonic interface enables wide-ranging advancements in optical ranging, display, communication, computation, imaging, and light-matter interaction. An optimal solution allows for 2D scanning of a diffraction-limited beam from anywhere on a photonic chip over a large number of beam-spots in free-space. Currently, devices with direct PIC integration rely on tiled apertures with poor mode qualities, large footprints, and complex control systems. Micro-mechanical beam scanners have good beam quality but lack direct PIC integration and are inertially-limited due to the use of bulk optical components or structures in which the optical aperture and actuator sizes are inextricably linked, resulting in trade-offs among resolution, speed, and footprint. Here, we overcome these limitations with the photonic "ski-jump": a nanoscale optical waveguide monolithically integrated atop a piezoelectrically actuated cantilever which passively curls ~90$^{\circ}$ out-of-plane in a footprint of <0.1 mm$^{2}$, emits sub-micron diffraction-limited optical modes, and exhibits kHz-rate mechanical resonances with quality factors exceeding 10,000. This enables two-dimensional beam-scanning with footprint-adjusted spot-rates of 68.6 mega-spots/(s$\cdot$mm$^{2}$) at CMOS-level voltages, which is equivalent to a 1 megapixel display at 100 Hz from a 1.5 mm$^{2}$ footprint, and exceeds the performance of state-of-the-art MEMS mirrors by >50$\times$. Using this device, we demonstrate image projection, video projection, and the initialization and readout of single photons from silicon vacancy centers in diamond waveguides. Based on current performance, we identify pathways for achieving >1 giga-spots at kHz-rates in a ~1 cm$^{2}$ area to provide a seamless, scalable optical pipeline between integrated photonic processors and the free-space world.

Silicon Photonics FMCW LiDAR Chip With a Slow-Light Grating Beam Scanner

Silicon FMCW LiDAR chip integrated with SLG beam scanner and k-clock interferometer for operation with wavelength-swept laser source

A 16-Channel Analog CMOS SiPM with On-Chip Front-End for D-ToF LiDAR

A Fully Solid-State Beam Scanner for FMCW LiDAR Application

Silicon photonic integrated FMCW coherent LIDAR receiving chip

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

FMCW LiDAR with a coherent receiver chip based on 3 μm SOI photonics platform

A Hybrid Solid-State Beam Scanner for LiDAR Applications

A Hybrid Solid-State Beam Scanner for FMCW LiDAR Application.

Fully Integrated FMCW LiDAR Optical Engine on a Single Silicon Chip

Solid-state FMCW LiDAR with in-fiber beam scanner

Photonic-electronic integrated circuit-based coherent LiDAR engine

A nanosecond pulsed CMOS LED for all-silicon time-of-flight ranging

Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

Solid-State Slow-Light Beam Scanner With Ultra-Large Field of View and High Resolution

Fully Integrated Coherent LiDAR in 3D-Integrated Silicon Photonics/65nm CMOS

Electronic-Photonic Integrated Circuit for 3D Microimaging

Beam-Steering Based on Dispersive Optical Phased Array for FMCW LiDAR Application

Hybrid Integrated Ultralow-Linewidth and Fast-Chirped Laser for FMCW LiDAR

Nanophotonic waveguide chip-to-free-space beam scanning at 68 Million Spots/(s$\cdot$mm$^{2}$)