Abstract:Microelectronic integration is a key enabler for the ubiquitous deployment of devices in large volumes ranging from MEMS and imaging sensors to consumer electronics. Such integration has also been achieved in photonics, where compact optical transceivers for data centers employ co-integrated photonic and electronic components. Chip-scale integration is of particular interest to coherent laser ranging i.e. frequency modulated continuous wave (FMCW LiDAR), a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range and immunity to interference. Full wafer-scale integration of this technology has been compounded by the stringent requirements on the lasers, requiring high optical coherence, low chirp nonlinearity and requiring optical amplifiers. Here, we overcome this challenge and demonstrate a photonic-electronic integrated circuit-based coherent LiDAR engine, that combined all functionalities using fully foundry-compatible wafer scale manufacturing. It is comprised of a micro-electronic based high voltage arbitrary waveform generator, a hybrid photonic circuit based tunable Vernier laser with piezoelectric actuators, and an erbium-doped waveguide optical amplifier - all realized in a wafer scale manufacturing compatible process that comprises III-V semiconductors, SiN silicon nitride photonic integrated circuits as well as 130nm SiGe BiCMOS technology. The source is a turnkey, linearization-free, and can serve as a 'drop-in' solution in any FMCW LiDAR, that can be seamlessly integrated with an existing focal plane and optical phased array LiDAR approaches, constituting a missing step towards a fully chip-scale integrated LiDAR system.

Silicon FMCW LiDAR chip integrated with SLG beam scanner and k-clock interferometer for operation with wavelength-swept laser source

Silicon FMCW LiDAR chip integrated with SLG beam scanner and k-clock interferometer for operation with wavelength-swept laser source

Silicon Photonics FMCW LiDAR Chip With a Slow-Light Grating Beam Scanner

A Fully Solid-State Beam Scanner for FMCW LiDAR Application

Silicon photonic integrated FMCW coherent LIDAR receiving chip

A 16-Channel Analog CMOS SiPM with On-Chip Front-End for D-ToF LiDAR

A Hybrid Solid-State Beam Scanner for FMCW LiDAR Application.

FMCW LiDAR with a coherent receiver chip based on 3 μm SOI photonics platform

Fully Integrated FMCW LiDAR Optical Engine on a Single Silicon Chip

Beam-Steering Based on Dispersive Optical Phased Array for FMCW LiDAR Application

Solid-state FMCW LiDAR with in-fiber beam scanner

Swept Source Lidar: simultaneous FMCW ranging and nonmechanical beam steering with a wideband swept source

Hybrid Integrated Ultralow-Linewidth and Fast-Chirped Laser for FMCW LiDAR

A Hybrid Solid-State Beam Scanner for LiDAR Applications

A microcomb-empowered Fourier domain mode-locked LiDAR

Photonic-electronic integrated circuit-based coherent LiDAR engine

Laser Feedback Frequency-Modulated Continuous-Wave LiDAR and 3-D Imaging.

2.2 km Ranging Based on Hybrid Integrated FMCW Laser

Linearization of wavelength sweeping lasers for the construction of 4-D FMCW LiDAR images of slow-moving objects using baseband beat note signals

Solid-state FMCW LiDAR with Two-Dimensional Spectral Scanning Using a Virtually Imaged Phased Array.

Electronic-Photonic Integrated Circuit for 3D Microimaging