Temperature-Driven alpha-beta Phase Transformation and Enhanced Electronic Property of 2H alpha-In2Se3

Fengjiao Lyu,Xuan Li,Jiamin Tian,Zhiwei Li,Bo Liu,Qing Chen
DOI: https://doi.org/10.1021/acsami.2c03270
IF: 9.5
2022-01-01
ACS Applied Materials & Interfaces
Abstract:In recent years, thin layered indium selenide (In2Se3) has attracted rapidly increasing attention due to its fascinating properties and promising applications. Here, we report the temperature-driven alpha-beta phase transformation and the enhanced electronic property of 2H alpha-In2Se3. We find that 2H alpha-In2Se3 transforms to beta-In2Se3 when it is heated to a high temperature, and the transformation temperature increases from 550 to 650 K with the thickness decreasing from 67 to 17 nm. Additionally, annealing the sample below the phase transformation temperature can effectively improve the electronic property of a 2H alpha-In2Se3 field-effect transistor, including increasing the on-state current, decreasing the off-state current, and improving the subthreshold swing. After annealing, not only the contact resistance decreases significantly but also the mobility at 300 K increases more than 2 times to 45.83 cm(2) V-1 s(-1), which is the highest among the reported values. Our results provide an effective method to improve the electrical property and the stability of the In2Se3 nanodevices.
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