Pt/Al2O3/TaO X /ta Self-Rectifying Memristor with Record-Low Operation Current (<2 Pa), Low Power (fj), and High Scalability

Sheng-Guang Ren,Run Ni,Xiao-Di Huang,Yi Li,Kan-Hao Xue,Xiang-Shui Miao
DOI: https://doi.org/10.1109/ted.2021.3134137
2022-01-01
Abstract:Self-rectifying memristor (SRM) with high rectification ratio (RR) and nonlinearity (NL) is a superior candidate for 3-D integrated array by effectively tackling the sneak path problem. In this article, we fabricated bilayer Pt/Al2O3/TaO $_{\!{X}}$ /Ta SRMs with a 250-nm feature size, which show record-low < 2-pA operation current, >103 ON-/ OFF-ratio, >104 RR, high uniformity, and good retention. The high resistance [low resistance state (LRS): 1010– $10^{11} \Omega $ , high resistance state (HRS): > $10^{14} \Omega $ ] yields fJ-level switching power consumption. Moreover, the SRMs exhibit superior NL (~104) and ultralow leakage current (~10 fA), leading to a calculated 538-Mbit passive array scalability with the premise of 10% read margin. Detailed mechanism analysis reveals that high RR and NL can be attributed to the high barrier in Pt/Al2O3 and Al2O3/TaO $_{\!{X}}$ interface, respectively, during the resistive switching process. Our work advances the development of SRMs for high-density passive array and even 3-D integration.
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