Pt/Al 2 O 3 /TaO X /Ta Self-Rectifying Memristor With Record-Low Operation Current (<2 pA), Low Power (fJ), and High Scalability

Sheng-Guang Ren,Run Ni,Xiao-Di Huang,Yi Li,Kan-Hao Xue,Xiang-Shui Miao
DOI: https://doi.org/10.1109/ted.2021.3134137
IF: 3.1
2022-02-01
IEEE Transactions on Electron Devices
Abstract:Self-rectifying memristor (SRM) with high rectification ratio (RR) and nonlinearity (NL) is a superior candidate for 3-D integrated array by effectively tackling the sneak path problem. In this article, we fabricated bilayer Pt/Al2O3/TaO$_{!{X}}$ /Ta SRMs with a 250-nm feature size, which show record-low &lt; 2-pA operation current, &gt;103 ON-/ OFF-ratio, &gt;104 RR, high uniformity, and good retention. The high resistance [low resistance state (LRS): 1010–$10^{11} Omega $ , high resistance state (HRS): &gt;$10^{14} Omega $ ] yields fJ-level switching power consumption. Moreover, the SRMs exhibit superior NL (~104) and ultralow leakage current (~10 fA), leading to a calculated 538-Mbit passive array scalability with the premise of 10% read margin. Detailed mechanism analysis reveals that high RR and NL can be attributed to the high barrier in Pt/Al2O3 and Al2O3/TaO$_{!{X}}$ interface, respectively, during the resistive switching process. Our work advances the development of SRMs for high-density passive array and even 3-D integration.
engineering, electrical & electronic,physics, applied
What problem does this paper attempt to address?