Multi Parameter Admittance Spectroscopy of MOSFETs with 2D MoS2 Channels

Eros Reato,Olof Engstroem,Zhenxing Wang,Annika Grundmann,Michael Heuken,Holger Kalisch,Andrei Vescan,Max C. Lemme
DOI: https://doi.org/10.1109/snw51795.2021.00042
2021-01-01
Abstract:We use Multi Parameter Admittance Spectroscopy (MPAS) for characterizing trapped charge in molybdenum disulphide (MoS2) based field-effect transistors (FETs). The method relies on frequency and voltage dependent admittance measurements and aims at characterization of energy positions and carrier emission rate of the traps. This characterization gives information about trap distributions in the MoS2 and the influence of traps in the gate oxide bulk.
What problem does this paper attempt to address?