Investigation of Switching Kinetics of Interface Traps in Metal-Oxide-Semiconductor-Field-Effect-Transistors with Ultra-narrow Channels

Y Shi,B Shen,HM Bu,XL Yuan,SL Gu,P Han,R Zhang,YD Zheng
DOI: https://doi.org/10.1143/jjap.41.2363
IF: 1.5
2002-01-01
Japanese Journal of Applied Physics
Abstract:In this paper, we report on the switching kinetics characteristics of interface traps in n-metal-oxide-semiconductor-field-effect-transistors (n-MOSFETs) with ultra-narrow channels. By analyzing the gate bias voltage and temperature dependence of the transition time and amplitude of the random telegraph signals (RTSs), it has been demonstrated experimentally that a thermally activated process may be dominant for Coulomb-repulsive centers and quantum mechanical tunneling is a favored process to Coulomb-attractive centers. The anomalous switching behaviors of RTSs having very large amplitude are well explained by the quantum mechanical tunneling model.
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