Traps Around Ge Schottky Junction Interface: Quantitative Characterization and Impact on the Electrical Properties of Ge MOS Devices

Junkang Li,Zhuo Chen,Yiming Qu,Rui Zhang
DOI: https://doi.org/10.1109/jeds.2020.2981627
2020-01-01
IEEE Journal of the Electron Devices Society
Abstract:This paper proposes and develops a new technique based on low temperature conductance method to quantitatively evaluate the trap densities around NiGe/Ge Schottky junction interface and their time constants. It is found that the Schottky barrier height (SBH) in the NiGe/Ge junction is related with these junction traps. Additionally, the traps around junction interface could strongly affect the electrical properties of Ge MOSFETs, especially the OFF-state currents.
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