Advances in Laser-Assisted Mass Transfer of MicroLED

SUN NingNing,YANG Biao,CHEN FuRong,HU JinLong,YU HaiYang,BIAN Jing,DUAN YongQing,HUANG YongAn
DOI: https://doi.org/10.1360/sst-2021-0234
2022-01-01
Abstract:Mass transfer is a key technology for accurately transferring tens of millions of micrometer-scale MicroLED from the source substrate to the donor substrate. Major challenges, including transfer yield, transfer accuracy, and transfer efficiency, have impeded the manufacture of MicroLED displays. Various laser-assisted transfer technologies have been developed based on the interaction of the laser-material interface. These technologies have become an excellent transfer solution with significant potential owing to their advantages of minimal device damage, high selectivity, and fast as well as efficient response. This article first introduces current technologies, difficulties, and challenges of mass transfer, and further reviews the latest developments review laser-assisted transfer technologies ultrathin microdevices, including the basic principles of laser interaction, transfer process, and currently attained level. Finally, the prospects and challenges of mass transfer for different MicroLED applications are discussed.
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