P‐10.1: Transfer Process of Micro‐LED Using Laser

Jiayi Li,Zhaojun Liu
DOI: https://doi.org/10.1002/sdtp.16412
2023-04-01
SID Symposium Digest of Technical Papers
Abstract:Micro-LED display technology has the potential to become the next generation of display technology due to its advantages such as high brightness and self-illumination. Currently, micro-LED display technology still faces several important issues, including full color display and integration. In order to realize the display function, the micro-LED needs to be integrated into the drive circuit, which can be achieved through monolithic integration and massive transfer. Laser plays an important role in micro-LED transfer technology. In this work, laser is used to peel off the sapphire substrate, allowing an array of individual micro-LED devices to be transferred onto the blue film.
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