Abstract:Nanocrystalline growth has been observed in carbon films deposited from a CH4-Ar r.f. plasma, The films were deposited on Si and glass substrates held at low temperature. X-ray analysis of the films grown on n-type Si (100) indicates the presence of diamond crystals up to 50 nm in diameter, with some evidence for oriented growth in the [111] direction parallel to Si [100]. The X-ray data also indicate the presence of SiC with the diamond. Transmission electron microscopy of the films deposited on glass shows smaller crystals up to 10 nm in diameter which can group themselves into large dendrite-like features. Parallel electron energy loss spectroscopy of these smaller crystals and the surrounding amorphous matrix confirms that the crystals are predominantly carbon. However, the electron diffraction data are not consistent with those expected for diamond or graphite. Instead, the five diffraction rings observed from these crystals can be fitted either to a tetragonal structure with a = 5.00 angstrom and c = 3.26 angstrom or to a hexagonal structure with a = 4.46 angstrom and c = 3.26 angstrom. Further work is required to be able either to distinguish between these two possibilities or perhaps to explain the ring sequence in terms of a completely different crystal structure

Synthesis Of Nano-Crystalline Diamond Film In Hot Filament Chemical Vapour Deposition By Adding Ar

Synthesis of Nano-Crystalline Diamond Films

The roles of argon addition in the hot filament chemical vapor deposition system

Nano-crystalline Diamond Films Synthesized at Low Temperature and Low Pressure by Hot Filament Chemical Vapor Deposition

Low-Temperature Growth Of Ultra-Thin Nano-Crystalline Diamond Films By Hfcvd In A Ch4/H-2 Mixture

Crystalline Diamond Growth in Thin Films Deposited from a CH4/Ar Rf Plasma

High quality nanocrystalline diamond films grown by RF-HFCVD

Preparation and Characterization of Ultrananocrystalline Diamond Films in H 2 /ar/ch 4 Gas Mixtures System with Novel Filament Structure

Highly Transparent Nanocrystalline Diamond Films On Quartz Substrates

Influence of Gas Reaction Source on the Preparation of Nano Diamond Films

Laser-assisted Chemical Vapor Deposition of Diamond Films

The Structural Evolution Of Nanocrystalline Diamond Films Synthesized By R.F. Pecvd

Effect of pressure on nanocrystalline diamond films deposition by hot filament CVD technique from CH4/H2 gas mixture

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Growth of Diamond Films on Si3n4 Coated Silicon Substrates

Nano-Crystalline Diamond Films with Pineapple-Like Morphology Grown by the Dc Arcjet Vapor Deposition Method

Growth of well-adhered and smooth diamond thin films on fused silica substrates

Deposition of diamond film on ferrous alloys substrate with Au/Cu interlayer by hot-filament chemical vapor deposition

Diamond Nanocrystals and Amorphous SiOx Nanowires Formed by Rapid Thermal Annealing of Carbon Film

The Microstructure Of Inclusions In Nanocrystalline Carbon-Films Deposited At Low-Temperature

GAS-JET SYNTHESIS OF DIAMOND COATINGS ON SILICON SUBSTRATES FROM AN H2 + CH4 + Ar MIXTURE ACTIVATED IN A MICROWAVE DISCHARGE