Microstructure and Properties of Porous Si3n4 Ceramics with A Dense Surface

Xiangming Li,Xiaowei Yin,Litong Zhang,Tianhao Pan
DOI: https://doi.org/10.1111/j.1744-7402.2009.02472.x
2011-01-01
International Journal of Applied Ceramic Technology
Abstract:Porous Si3N4 ceramics with a dense surface are fabricated by a joint process of pressureless sintering and chemical vapor deposition (CVD). Before CVD, the Si3N4 ceramic shows a uniform microstructure with well-distributed pores. During CVD, the depositions of Si3N4 in the inner surface and on the external surface of the ceramics lead to a decrease of porosities and pore sizes. As a result, both the flexural strength and fracture toughness of the Si3N4 ceramic increase by > 30%, the surface hardness increases more than five times, and the dielectric constant and loss increase slightly.
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