Abstract:In view of the promising role of the MOCVD technique in the advance of YBCO high- T c superconducting thin films grown for device applications, a simplified chemical vapor deposition system with a single mixed organometallic precursor was built and tested. Single phase YBa 2 Cu 3 O 7-δ films with T c values around 90 K were readily obtained on (100) YSZ and (100) MgO substrates with a normal precursor mass transport. Investigations indicate that, in addition to the gas phase stoichiometry as a major factor, the phase composition and crystallite orientations of the YBCO films were considerably affected by the oxidation agent (partial pressure and concentration) as well as the substrate temperature. The films could be either highly oriented (00 l ) or (100) and / or (110) orientation dominated. A single phase Y 2 Cu 2 O 5 film with (002) orientation was obtained from a Ba deficient gas phase. The variation in superconducting behavior of the YBCO thin films deposited under different conditions was not only related to these phases but also to the growth orientation. The film uniformity and flatness are examined and discussed in terms of the gas flow pattern in the reactor.

Crystallization Characteristics Of Yba2cu3o7-Delta Film During Tfa-Mod

Crystallization Characteristics of YBa2Cu3O7−δ Film During TFA-MOD

Study on the growth of YBCO films deposited by TFA-MOD method

Polymer Assisted Thick Single-Layer YBa 2 Cu 3 O 7-Δ Films Prepared with Modified TFA-MOD Method

Preparation of YBa2Cu3O7−δ Films by MOD Method Using Trifluoroacetate As Precursor

Phase Transition During Sintering Process Before Nucleation of TFA-MOD YBa2Cu3O7-δ Films

Preparation and Characterization of Microcrack-Free Thick YBa 2 Cu 3 O 7-Δ Films

Controlled-Growth of Yba2cu3o7-Delta Film Using Modified Low-Fluorine Chemical Solution Deposition

Precursor evolution and growth mechanism of BTO/YBCO films by TFA—MOD process

Transient Liquid Assisted Nucleation Mechanism of YBa 2 Cu 3 O 7− Δ in Coated Conductor Films Derived by BaF 2 Process

Mod-derived YBa2Cu3O7-δ thin filmsusing a fast pyrolysis process

In situ high temperature optical microscopy study of phase evolution in YBa 2 Cu 3 O 7 d films prepared by a fluorine-free sol – gel route

Phase Transition During Heat Treatment of Precursor Before YBa 2 Cu 3 O 7− Δ Nucleation in TFA–MOD Method

Yba2cu3o7-Delta Thin-Films with Bao Precipitates

Decomposition and Oriented Growth of Yba2cu3o7-X Films Prepared with Low Fluorine Tfa-Mod Approach

Effect of Annealing Time on the Structure and Properties of YBCO Films by the TFA–MOD Method

Carbon Dioxide Controlled Thermal-Decomposition Reactions for Preparation of High Quality YBCO Films Derived from Fluorine-Free Solution

Study on the growth rate of YBCO films prepared by TFA-MOD

Formation and Characterization of YBa2Cu3O7−δ High-Tc Thin Films by MOCVD with Single Mixed Precursor

Controlled-Growth of $\hbox{YBa}_{2}\hbox{Cu}_{3}\hbox{O}_{7-\delta} $ Film Using Modified Low-Fluorine Chemical Solution Deposition

A Rapid Process of YBa2Cu3O7−δthin Film Fabrication Using Trifluoroacetate Metal–organic Deposition with Polyethylene Glycol Additive