Research On A New Approach For The Fabrication Of Diffractive Optical Elements By Means Of Rotating Digital Mask

Q Jin,Yq Gao,Nn Luo,Jw Hu
2005-01-01
Abstract:An approach, used to fabricate diffractive optical elements (DOEs), is presented by applying reduction projecting system based on digital micro-mirror device (DMD)([1][2]) and digital mask technique([3]) The accumulation of exposure energy can be obtained through modulating rotating velocity of mask graphics, and finally distribution of exposure, which is required, can be achieved. It shows that the method is Practical and feasible on the grounds of the results of MATLAB simulation and experiments. The fabricated DOE has the same structure as the Fresnel lens. The method avoids the mechanical alignment error and mismachining tolerance, and improves efficiency of DOEs fabrication, in addition, it can low the manufacture cost.
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