Abstract:In high power laser system, such as inertial confinement fusion(ICF) and laser forming, the requirement for the intensity distribution of the focused laser profile must be top head, steep edge, low side lobe and concentrated high power performance in the main lobe. Diffractive Optical Element(DOE) is used to produce an arbitrary radiation distribution on the focal plane. It has the features of high diffraction efficiency, steep edge, small side lobes and high flexibility. A kind of hybrid algorithm based on hill-climbing and simulated annealing is utilized for phase design because of the ability of strong convergence of the hill-climbing and the global optimization potential of the simulated annealing. Continuous phase should be adopted to increase the light efficiency and decrease wide-angle scattering. The continuous phase DOE with diameter 100mm has been obtained by gray-level mask and ion-etching on the K9-glass substrate. The DOE's interferogram is given to detect the precision of manufacturing. The manufacturing error, including depth error and alignment error, are analyzed. The intensity distribution of the focal spot is measured by a general CCD, and a series of attenuators are used to increase the dynamic range of the CCD. The results after data-processing show that the uniform illumination has been obtained.

Design of Diffractive Optical Elements for Controllable Axial Long Depth of Focus

A Method for Extending Depth of Focus in STED Nanolithography

Formation of Sub-Half-Wavelength Focal Spot with Ultra Long Depth of Focus

Theoretical and Practical Guide for an Axial Superresolved Focus Via Gouy Phase Steering

Improving Diffraction Efficiency of DOE in Wide Waveband Application by Multilayer Micro-Structure

Fast Method for Designing Broadband Achromatic Diffractive Optical Elements.

Designing Diffractive Optical Elements for Special Functions Using a Rigorous Method

Design of Diffractive Optical Elements for Subdiffraction Spot Arrays with High Light Efficiency

Generation of needle-shaped beam with super-resolution spot and large depth of focus using diffractive optics

Precise Design of Two-Dimensional Diffractive Optical Elements for Beam Shaping.

Diffractive optical element used to control side lobe to be extremely low in a large region

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Continuous Phase Diffractive Optical Element for Uniform Focal Spot

Rigorous electromagnetic design of finite-aperture diffractive optical elements by use of an iterative optimization algorithm.

Design And Manufacture Of Continuous Phase Diffractive Optical Element For Beam Transform

Beam Shaping for Multicolour Light-Emitting Diodes with Diffractive Optical Elements

Design of Refractive/diffractive Hybrid Optical Elements for Beam Shaping with Large Diffraction Pattern

End-to-End Design of Diffractive Optical Elements Fabricated by Direct Laser Writing Lithography

Design of Diffractive Optical Elements for Beam Shaping in Near Fresnel Diffraction Domain

Super-resolution Hollow Beams with Long Depth of Focus Formed by Diffractive Optical Elements

Design of diffractive optical element for true beam smoothing