End-to-End Design of Diffractive Optical Elements Fabricated by Direct Laser Writing Lithography

Yunpeng Xu,Zihan Zang,Haoqiang Wang,Yanjun Han,Hongtao Li,Lai Wang,Changzheng Sun,Zhibiao Hao,Bing Xiong,Jian Wang,Yi Luo
DOI: https://doi.org/10.1109/ACP/POEM59049.2023.10369602
2023-01-01
Abstract:Based on differentiable models of fabrication and optics, we introduce an “end-to-end” strategy for the optimization of diffractive optical elements (DOEs) fabricated via direct laser writing lithography, achieving enhanced performance and increased fabrication tolerance.
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