Abstract:A SiO2/Al/LiNbO3 structure has a large electromechanical coupling factor (K-2) and good temperature coefficient of frequency (TCF) for applications as a SAW duplexer of the Universal Mobile Telecommunications System (UMTS) Band I. However, the SiO2/Al/LiNbO3 structure also supports two unwanted spurious responses; one is caused by the Rayleigh mode and the other by the transverse mode. As the authors have previously discussed, the Rayleigh-mode spurious response can be suppressed by controlling the cross-sectional shape of a SiO2 overlay deposited on resonator electrodes. In this paper, a new technique to suppress the transverse-mode spurious responses is proposed. In the technique, the SiO2 overlay is selectively removed from the dummy electrode region. The spurious responses are analyzed by the laser probe system. The results indicate that the spurious responses in question were hybrid modes caused by the coupling between the main (SH) SAW and another (Rayleigh) SAW with different velocities. The hybrid-mode spurious behavior was dependent on the velocities in the IDT and the dummy regions (v(i) and v(d)). The hybrid-mode spurious responses could be suppressed by selectively removing SiO2. Furthermore, the SAW energy confinement could be enhanced in the IDT electrode region when v(i) < v(d). The transverse-mode spurious responses were successfully suppressed without degrading the SAW resonator performances.

I.H.P. SAW Transverse Edge Design for Energy Confinement with Suppressed Scattering Loss and Transverse Mode

Double Busbar Structure for Transverse Energy Leakage and Resonance Suppression in Surface Acoustic Wave Resonators Using 42°YX-Lithium Tantalate Thin Plate

A New Type of Periodically Loaded Half-Mode Substrate Integrated Waveguide and Its Applications

Transverse energy confinement and resonance suppression in SAW resonators using low-cut lithium tantalate

COM-based Modeling of SAW Scattering at Reflector Outer Edges in I.H.P. SAW Resonator

Study on Loss Mechanisms in I.H.P. SAW Assisted by Full-3D Hierarchical Cascading Technique

Bandpass Frequency Selective Surface with Two Sharp Sidebands Based on Shunted Quarter‐mode Substrate Integrated Waveguide Cavities

Full 3D FEM Analysis of Scattering at a Border Between IDT and Reflector in SAW Resonators

Design of a Tapered Frequency Selective Surface for the Suppression of Edge Wave Scattering

Tilted IDT Designs for Spurious Modes Suppression in LiNbO$_{\text{3}}$/SiO$_{\text{2}}$/Si SAW Resonators

Tilted IDT Designs for Spurious Modes Suppression in LiNbO3/SiO2/Si SAW Resonators

Half-Mode Substrate Integrated Waveguide Dispersion Tailoring Using 2.5-D Spoof Surface Plasmon Polaritons Structure

Suppression of Transverse Mode Responses for Ultra-Wideband and Low-Loss SAW Filters on a Cu-grating/15&amp;#x00B0;YX-LiNbO/sub 3/ Structure

Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression

Suppression of Transverse-Mode Spurious Responses for Saw Resonators on Sio2/Al/Linbo3 Structure by Selective Removal of Sio2

Waveguide Dispersion Tailoring by Using Embedded Impedance Surfaces

Use of periodically slotted SiO2 in a layered surface acoustic wave structure for transverse mode suppression

Suppression of Transverse Mode Responses in Ultra-Wideband SAW Resonators Fabricated on a Cu-Grating/15°YX-LiNbO 3 Structure

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

Suppression of transverse mode responses in ultra-wideband SAW resonators fabricated on a Cu-grating/15 degrees YX-linbO3 structure.

Modeling of End Radiation and Leakage in I.H.P. SAW Resonators on Lithium Tantalate with Low Cut Angle