Abstract:High-performance wideband acoustic filters are urgently needed for communication systems with large volumes of data. Recently, multilayered surface acoustic wave (SAW) resonators have attracted wide attention as key components of acoustic filters. In our previous work, we proposed a shear-horizontal SAW (SH-SAW) resonator based on a 30° YX -LiNbO3/SiO2/Si substrate. This resonator achieved an effective electromechanical coupling coefficient ( ${k}^{{2}}_{\text {eff}}$ ) of 24.4% and a Bode- ${Q}_{\text {max}}$ of 1092. However, the admittance/conductance showed obvious transverse and longitudinal modes spurious that degraded the resonator’s performance. To address this issue, we adopted a tilted interdigital-transducer (IDT) design in this article, which combined dispersion/slowness characteristic analysis and tilted angle optimization using the finite-element method (FEM). The simulations and experimental results have verified the successful suppression of both transverse and longitudinal modes when the tilted angle of the IDT reaches 16°. Moreover, the adoption of the tilted IDT designs for spurious modes suppression does not result in the evident sacrifice of the ${k}^{{2}}_{\text {eff}}$ . The proposed resonator has the potential to be used in the development of acoustic filters with large bandwidth, low loss, and no ripples.

Modeling of End Radiation and Leakage in I.H.P. SAW Resonators on Lithium Tantalate with Low Cut Angle

COM-based Modeling of SAW Scattering at Reflector Outer Edges in I.H.P. SAW Resonator

Study on Loss Mechanisms in I.H.P. SAW Assisted by Full-3D Hierarchical Cascading Technique

A Simple Technique to Evaluate Lateral Leakage and Transverse Mode Behaviors of Reflectors in SH-Type SAW Resonator

Full 3D FEM Analysis of Scattering at a Border Between IDT and Reflector in SAW Resonators

I.H.P. SAW Transverse Edge Design for Energy Confinement with Suppressed Scattering Loss and Transverse Mode

Impact of Lateral Leakage Loss in a Kind of Shallowly-etched Rib Waveguides on SOI with Non-rectangular Cross-section

Resonant Excitation Analysis on Asymmetrical Lateral Leakage of Light in Finite Zero-Contrast Grating Mirror

Optimal cut for leaky SAW on LiTaO3 for high performance resonators and filters

Tilted IDT Designs for Spurious Modes Suppression in LiNbO$_{\text{3}}$/SiO$_{\text{2}}$/Si SAW Resonators

Effective Electromechanical Coupling to Leaky SAW on 36° YX-LiTaO3

Band 40/41 Surface Acoustic Wave Filters on 42°YX-Lithium Tantalate Substrate with Suppression of Transverse Leakage

Tilted IDT Designs for Spurious Modes Suppression in LiNbO3/SiO2/Si SAW Resonators

Spurious-Free Shear-horizontal SAW Resonators Using LiTaO3/SiO2/Si Substrate

Double Busbar Structure for Transverse Energy Leakage and Resonance Suppression in Surface Acoustic Wave Resonators Using 42°YX-Lithium Tantalate Thin Plate

Spurious-Free Shear-horizontal SAW Resonators Using LiTaO<inf>3</inf>/SiO<inf>2</inf>/Si Substrate

Impact of SAW Slowness Shape on Anti-Resonance Quality Factor of RF SAW Resonators

Transverse energy confinement and resonance suppression in SAW resonators using low-cut lithium tantalate

Optimum Leaky-Saw Cut of LiTaO/sub 3/ for Minimised Insertion Loss Devices

Composite Right/Left-Handed Substrate Integrated Waveguide Leaky-Wave Antennas

3.5 GHz longitudinal leaky surface acoustic wave resonator using a multilayered waveguide structure for high acoustic energy confinement