Abstract:Featuring a pronounced leakage suppression of acoustic energy, the construction of multilayer stacks offers an effective avenue for surface acoustic wave (SAW) devices to remain competitive in fifth-generation (5G) applications. While the target modes experience significant enhancement due to the waveguide effect, transverse spurious responses are also confined and amplified, leading to severe in-band ripples and limited rejection in the corresponding filter. Guided by the slowness dispersion analysis, commercially available AT-Quartz was identified as the optimal substrate that inherently suppresses these unwanted modes without additional countermeasures. The mechanism of slowness manipulation by combining several substrates including AT-Quartz, Si, SiC, and Sapphire with LiTaO(3 )was studied through the finite-element method (FEM), validating the superior potential of AT-Quartz for transverse mode suppression. Furthermore, the curvature dispersion characteristic of the slowness curve on the 42 degrees Y-X LiTaO3 (LT)/AT-Quartz platform as functions of hLT/A, and hAl/A, were investigated, which revealed a substantial parameter space devoid of spurious responses. Under the guidance of the suppression window, a series of spurious-free resonators with pure spectrum were successfully implemented without any treatment of interdigital transducer (IDT), with a typical one maintaining a remarkable maximum Bode-Q value of 2891 and a large figure of merit (FoM) of 334. The demonstrated LT/AT-Quartz platform has shown strong potential for high-performance, spurious-free, and compact acoustic components for front-end applications.

Transverse energy confinement and resonance suppression in SAW resonators using low-cut lithium tantalate

Double Busbar Structure for Transverse Energy Leakage and Resonance Suppression in Surface Acoustic Wave Resonators Using 42°YX-Lithium Tantalate Thin Plate

Combination of Tetragonal Crystals With LiTaO3 Thin Plate for Transverse Resonance Suppression of Surface Acoustic Wave Devices

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression

Tilted IDT Designs for Spurious Modes Suppression in LiNbO3/SiO2/Si SAW Resonators

Tilted IDT Designs for Spurious Modes Suppression in LiNbO$_{\text{3}}$/SiO$_{\text{2}}$/Si SAW Resonators

Use of periodically slotted SiO2 in a layered surface acoustic wave structure for transverse mode suppression

Inherent Suppression of Transverse Modes on LiTaO3/AT-Quartz SAW Devices

Use of periodic trenches in SMR-type XBAR for suppression of transverse mode resonances and lateral leakage

Tilted Interdigital-transducer in NS-SAW Resonator for Transverse Mode Suppression

Suppression of spurious responses near anti-resonance of TC-SAW resonators by selective thinning of SiO2

Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates

SAW velocity reduction and spurious modes suppression on the layer structure

Spurious-Free Shear-horizontal SAW Resonators Using LiTaO3/SiO2/Si Substrate

Layered LiNbO $_{3}$ /At-Quartz Wideband Devices with Inherent Transverse Mode Suppression

High Frequency, Low Loss and Low TCF Acoustic Devices on LiTaO3-on-SiC Substrate

Single-Crystalline LiTaO 3 Film-Based High-Frequency Surface Acoustic Wave Resonators and Electronics Applications

High-Performance Acoustic Wave Devices on LiTaO$_{3}$/SiC Hetero-Substrates

Suppression of Transverse Modes in 50°YX-LiTaO 3 /SiO 2 /Si POI SAW Resonator with Groove Configuration

Spurious-Free Shear-horizontal SAW Resonators Using LiTaO<inf>3</inf>/SiO<inf>2</inf>/Si Substrate