Abstract:A SiO2/Al/LiNbO3 structure has a large electromechanical coupling factor (K2) and good temperature coefficient of frequency (TCF) for the UMTS Band I application. However, the SiO2/Al/LiNbO3 structure also supports two unwanted spurious responses; one is caused by the Rayleigh mode and the other by the transverse-mode. As the authors have previously discussed, the Rayleigh-mode spurious response can be suppressed by controlling the cross-sectional shape of a SiO2 overlay deposited on resonator electrodes. On the other hand, the transverse-mode spurious responses are commonly suppressed by IDT (Interdigital Transducer) apodization, and the length weighting for dummy electrodes selectively could scatter higher order transverse-mode spurious responses. In this paper, the spurious responses of the SAW resonator on a SiO2/Al/LiNbO3 structure are analyzed by the laser probe system. And, a new technique to suppress the transverse-mode spurious responses is proposed. In the technique, the SiO2 overlay is selectively removed from the dummy electrode region. The transverse-mode spurious behavior was dependent on the velocities (vi and vd) in the IDT and the dummy regions. When vi <; vd, the higher-order transverse-mode spurious response could be suppressed. Furthermore, the SAW energy confinement could be enhanced in the IDT electrode region by selectively SiO2 removing. The transverse-mode spurious responses were successfully suppressed without degrading the SAW resonator performances.

Use of periodically slotted SiO2 in a layered surface acoustic wave structure for transverse mode suppression

Application of Periodically Slotted SiO2 to Layered SAW Structure for Manipulation of SAW Slowness Curve

Use of Dielectric Stripes for Transverse Mode Suppression for Surface Acoustic Wave Resonators

SAW velocity reduction and spurious modes suppression on the layer structure

Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression

Influence of Displacement and Patterning of Phase Shifters for Piston Mode Operation of Temperature Compensated Surface Acoustic Wave Resonators on SiO2/LiNbO3 Structure

Transverse energy confinement and resonance suppression in SAW resonators using low-cut lithium tantalate

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

Double Busbar Structure for Transverse Energy Leakage and Resonance Suppression in Surface Acoustic Wave Resonators Using 42°YX-Lithium Tantalate Thin Plate

Suppression of Transverse-Mode Spurious Responses for Saw Resonators on Sio2/Al/Linbo3 Structure by Selective Removal of Sio2

Use of periodic trenches in SMR-type XBAR for suppression of transverse mode resonances and lateral leakage

Transverse Mode Suppression for S0-Like SAW Mode Resonator

Suppression of Transverse-Mode Spurious Responses by Selectively SiO2 Removing Technique for SAW Resonators on a SiO2/Al/LiNbO3 Structure

Investigation of Spurious Mode Suppression in 3.8 GHz Shear-Horizontal Mode Surface Acoustic Wave Resonators Based on LiNbO3/SiO2/Si Multilayer Structure

Suppression of Transverse Modes in 50°YX-LiTaO 3 /SiO 2 /Si POI SAW Resonator with Groove Configuration

Layered LiNbO $_{3}$ /At-Quartz Wideband Devices with Inherent Transverse Mode Suppression

Tilted Interdigital-transducer in NS-SAW Resonator for Transverse Mode Suppression

Suppression of spurious responses near anti-resonance of TC-SAW resonators by selective thinning of SiO2

Analysis of Rayleigh-Mode Spurious Response Using Finite Element Method/Spectrum Domain Analysis for Surface Acoustic Wave Resonator on Nonflat SiO<sub>2</sub>/Al/LiNbO<sub>3</sub> Structure

Application of an overlay for spurious suppression of multi-layered surface acoustic wave resonators with double busbar configuration

Tilted IDT Designs for Spurious Modes Suppression in LiNbO$_{\text{3}}$/SiO$_{\text{2}}$/Si SAW Resonators