Abstract:High-performance wideband acoustic filters are urgently needed for communication systems with large volumes of data. Recently, multilayered surface acoustic wave (SAW) resonators have attracted wide attention as key components of acoustic filters. In our previous work, we proposed a shear-horizontal SAW (SH-SAW) resonator based on a 30° YX -LiNbO3/SiO2/Si substrate. This resonator achieved an effective electromechanical coupling coefficient ( ${k}^{{2}}_{\text {eff}}$ ) of 24.4% and a Bode- ${Q}_{\text {max}}$ of 1092. However, the admittance/conductance showed obvious transverse and longitudinal modes spurious that degraded the resonator’s performance. To address this issue, we adopted a tilted interdigital-transducer (IDT) design in this article, which combined dispersion/slowness characteristic analysis and tilted angle optimization using the finite-element method (FEM). The simulations and experimental results have verified the successful suppression of both transverse and longitudinal modes when the tilted angle of the IDT reaches 16°. Moreover, the adoption of the tilted IDT designs for spurious modes suppression does not result in the evident sacrifice of the ${k}^{{2}}_{\text {eff}}$ . The proposed resonator has the potential to be used in the development of acoustic filters with large bandwidth, low loss, and no ripples.

Study on Loss Mechanisms in I.H.P. SAW Assisted by Full-3D Hierarchical Cascading Technique

Study of Loss Mechanisms in Temperature Compensated Surface Acoustic Wave Devices Based on Finite Element Method Analysis Using Hierarchical Cascading Technique

Full 3D FEM Analysis of Scattering at a Border Between IDT and Reflector in SAW Resonators

Full 3D FEM Simulation of Thickness Shear Bulk Acoustic Resonators on LN Assisted by Hierarchical Cascading Technique

Modeling of End Radiation and Leakage in I.H.P. SAW Resonators on Lithium Tantalate with Low Cut Angle

A Simple Technique to Evaluate Lateral Leakage and Transverse Mode Behaviors of Reflectors in SH-Type SAW Resonator

Use of Hierarchical Cascading Technique for FEM Analysis of Transverse-Mode Behaviors in Surface Acoustic-Wave Devices

Iterative Hierarchical Cascading Technique for Fast Dispersion Analysis of 3D Periodic Piezoelectric Resonators

COM-based Modeling of SAW Scattering at Reflector Outer Edges in I.H.P. SAW Resonator

I.H.P. SAW Transverse Edge Design for Energy Confinement with Suppressed Scattering Loss and Transverse Mode

3D FEM Simulation of SAW Resonators Using Hierarchical Cascading Technique and General Purpose Graphic Processing Unit

The Modeling and Analysis of Surface Acoustic Wave Filter Based on IDT/AIN/LiNbO3

Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators

Characterization of Surface Acoustic Wave Propagation in Multi-Layered Structures Using Extended Fem/Sda Software

Experimental Studies of Q Deterioration in SH-Type SAW Resonators Employing an Apodized Interdigital Transducer IDT SH SAW

Tilted IDT Designs for Spurious Modes Suppression in LiNbO$_{\text{3}}$/SiO$_{\text{2}}$/Si SAW Resonators

Application of Hierarchical Cascading Technique to Finite Element Method Simulation in Bulk Acoustic Wave Devices

8E-6 Extended FEM/SDA Software for Characterising Surface Acoustic Wave Propagation in Multi-Layered Structures

Analysis of SAW Scattering at Discontinuity Between Periodic Gratings Using Travelling Wave Excitation and Hierarchical Cascading Technique

Applicability of Single Precision Graphics Processing Unit for Fast Simulation of 2D Surface Acoustic Wave Devices Using an Hierarchical Cascading Technique

Tilted IDT Designs for Spurious Modes Suppression in LiNbO3/SiO2/Si SAW Resonators