Iterative Hierarchical Cascading Technique for Fast Dispersion Analysis of 3D Periodic Piezoelectric Resonators

Zihao Xie,Dongze Lv,Jin Xie,Renjie Tan
DOI: https://doi.org/10.1109/nems60219.2024.10639837
2024-01-01
Abstract:This paper reports an iterative hierarchical cascading technique (IHCT) for the dispersion analysis of 3D accelerated periodic piezoelectric resonators, addressing the issues of long calculation time and large memory requirements caused by the extensive degrees of freedom in finite element methods (FEM). The geometric rotational symmetry of a interdigital transducer (IDT) is utilized for B-matrix rotation and iterative cascading, facilitating rapid longitudinal dimension dispersion analysis for acoustic devices such as lamb mode resonators (LMRs) and laterally excited bulk acoustic wave resonators (XBARs). This method is verified via analyzing the longitudinal dimension dispersion of 920 MHz fundamental symmetric (S 0 ) mode LMRs and effectively separating spurious shear-horizontal (SH) modes from the main mode. Compared with FEM and traditional HCT, the simulation time has been significantly reduced, and the speed is increased by 36 and 9 times, respectively.
What problem does this paper attempt to address?