Effect of Annealing on the Microstructure and Mechanical Properties of Ti0.17Al0.83N Coating Prepared by Low Pressure Chemical Vapor Deposition

Fangfang Zeng,Lianchang Qiu,Yong Du,Liying Wu,Mingqiang Chu,Shuyan Zhang
DOI: https://doi.org/10.1016/j.surfcoat.2021.127014
2021-01-01
Abstract:The face-centered-cubic (fcc) Ti0.17Al0.83N coating was deposited on cemented carbide insert by low pressure chemical vapor deposition (LPCVD) method. The effects of annealing temperature and atmosphere on the surface and fracture morphology, phase structure, residual stress, and hardness of the Ti0.17Al0.83N coating were studied. TEM analysis indicated that the as-deposited Ti0.17Al0.83N coating was self-organized with a periodically alternating Al-rich (9 nm) and Ti-rich (2 nm) nanolamellae. The width of the Al-rich (12 nm) and Ti-rich (3 nm) nanolamellae was increased after annealing in vacuum at 900 degrees C for 1 h. With the rise of vacuum annealing temperature from 700 to 1200 degrees C, the coating hardness was increased and then decreased while the compressive residual stress was increasing continuously. A maximum hardness of 46.5 GPa was obtained after annealing in vacuum at 900 degrees C for 1 h. The coating grains cracked with the compressive residual stress of -1.55 GPa after annealing in vacuum at 1100 degrees C for 1 h. The surface morphology of the coating was basically unchanged after annealing in air at 900 degrees C for 1 h, while it was completely oxidized with the formation of Al2O3 on the surface after annealing at 1000 degrees C.
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