Investigation on the Microstructure and High-Temperature Properties of AlN Coating Through Oxygen Addition

Jian W. Du,Li Chen,Xiang D. Zhang,Hua D. Zhang,Jiong Wang,Yu X. Xu
DOI: https://doi.org/10.1016/j.ceramint.2024.09.087
IF: 5.532
2024-01-01
Ceramics International
Abstract:This study meticulously examines how oxygen incorporation alters the microstructure, mechanical, and high-temperature properties of AlN coating prepared via cathodic arc deposition. Substitution of nitrogen by oxygen in the AlN lattice leads to the formation of Al(OxN1-x)(y) metastable solid solutions from wurtzite Al(O)N structure to cubic AlO(N) structure, culminating in a full conversion to gamma-Al2O3 with increased oxygen content. This substitutive solid solution induces solid solution strengthening and grain refinement effect, thereby escalating hardness from similar to 18.5 GPa for AlN to similar to 23.9 GPa for Al(O0.18N0.82)(1.09). Despite an observed tendency towards enhanced thermal decomposition of oxynitride coatings upon annealing, the occurrence of alpha-Al2O3 oxide phase significantly preserves the mechanical integrity at elevated temperatures, outperforming pure AlN coating. Notably, the strategic alteration by minimal oxygen incorporation facilitates the formation of an Al-rich oxide layer, which exhibits superior anti-oxidative characteristics. After oxidation at 1100 degrees C for 10 h, the Al(O0.10N0.90)(1.03) with an oxide layer of similar to 1.2 mu m exhibits remarkable oxidation resistance.
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