Investigation of TiN film on an RF ceramic window by atomic layer deposition
Zhen Peng,Gen Chen,Yan-Ping Zhao,Xin Zhang,Yun-Tao Song,Grigori Shirkov,Galina Karamysheva,Oleg Karamyshev,Luciano Calabretta,Antonio Caruso
DOI: https://doi.org/10.1116/6.0000159
2020-09-01
Abstract:To reduce the secondary emission yield of an RF window ceramic so as to suppress the occurrence of a multipactor, we propose coating the window with a titanium nitride (TiN) film by atomic layer deposition. We investigate two groups of samples with film thicknesses of 56 and 8 nm, respectively, to analyze the composition and optimize the coating thickness of the TiN film on the ceramic. For the first group of samples (56 nm films), x-ray photoelectron spectroscopy (XPS) results show that the film can be divided into three mixed layers: a top layer composed of TiO<sub>x</sub>N<sub>y</sub> and TiO<sub>2</sub>; a middle layer consisting of TiN, TiO<sub>x</sub>N<sub>y</sub>, TiO<sub>2</sub>, and TiC; and a bottom layer called a diffusion layer, formed by decreasing TiN, TiO<sub>x</sub>N<sub>y</sub>, TiO<sub>2</sub>, TiC, and increasing <span class="equationTd inline-formula"><math> A l 2 O 3</math></span> as the ceramic is approached. The depth of this bottom layer is ∼8 nm. Two more films (8 nm films) in the second group of samples were grown on a 96 ceramic and silicon to determine the sheet resistance, those on silicon is ∼1 kΩ/□ as measured by spectroscopic ellipsometry. According to the XPS results of the two 8 nm films, the content of TiO<sub>x</sub>N<sub>y</sub> and TiO<sub>2</sub> increased while TiN content decreased in the film on 96 ceramic, compared to the film on silicon. Therefore, the 8 nm film is suitable for use as a coating for the RF window to weaken the multipactor effect and lower conductivity. To test the film performance, an RF ceramic window is coated with an 8 nm TiN film. Low-power measurements show that, within a frequency of 100 MHz, the 8 nm film on the RF ceramic window has a negligible effect on its transmission characteristics. 8 kW RF power tests indicate that the film coating can significantly improve the power transmission, anti-multipaction, and stability of the RF window.
physics, applied,materials science, coatings & films