An automatic monitoring-measurement system with a static probe for the ECR plasma source

Hui-jun PENG,Jian CHENG,Xin LV
DOI: https://doi.org/10.3969/j.issn.1000-0682.2005.05.015
2005-01-01
Abstract:ECR plasma source consists of electrical soure,deflation system,air feed system,electron tube etc.For study purpose,It also includes a measurement control system.The conventional measurement control system are used to take single control to the system equipment,which is adjustable manually.It makes the system inefficient.This paper proposes a method of automatic measurement control for the system,using analog switches to transfer several analog signals with a charge amplifier to magnify weak signals.This method is very effective in practice.
What problem does this paper attempt to address?