Design of a Plasma Emission Monitoring System Used in a Reactive Sputtering Coating

肖劲宇,和军平
2011-01-01
Abstract:A Plasma Emission Monitoring(PEM) control system based on Allen-Bradley PLC Controller is designed by means of PID algorithm in this paper.Sputter coating principle is introduced firstly and its disanvantage is analyzed too.Then a PEM control technology is proposed to improve sputter coating performance.Besides discussing the sensor,actuator and controller,PID control program in PLC is introduced.A prototype is built up and it works normally.In the end,several process related elements that affect the accuracy,the stability of PEM control loop are also mentioned.
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