The Control System of a Magnetic Scattering Vacuum Three-target Film Coating Machine Realized by PLC

徐祖华,黄智伟,朱慧玲
DOI: https://doi.org/10.3969/j.issn.1000-3886.2004.02.018
2003-01-01
Abstract:With Mitsubishi PLC and Easy View touch screen , the control system of magnetic scattering vacuum three-target film coating machine can set parameters, control process-flow, give alarm and protection in case break-down occurs. This paper introduces the software and the hardware structures of the PLCcontrol system as well as the close-circuit control of the target unit, which aims at stabilizing target current.
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