The Fuzzy Control System on Target Power Supply of a Vacuum Film Coating Machine

Xu Zu
2004-01-01
Abstract:This article introduces the fuzzy control system on target power supply of a vacuum three target film coating machine and comcurrently introduces the control way ,which based on fuzzy control theory,as well as the hardware structures and software program of the close circuit control of the target power supply, which aims to stabilize target current.
What problem does this paper attempt to address?