Controller of Target Power Supply in Multi-Arc Ion Vacuum Deposition

Li Yanzhe,Fan, Duowang,Yang Chaohui,Kong Linggang,Zhang Weizhong
DOI: https://doi.org/10.1109/INOW.2007.4302986
2007-01-01
Abstract:A controller based around DSP techniques is built. The purpose of controller is to isolate the faulty or failed target power supply to a nicety, and ensure safety with minimal disruption to vacuum deposition.
What problem does this paper attempt to address?