Properties of W-Mo Co-Doped In2O3 Thin Films Grown by Electron Beam Deposition

REN Shi-rong,CHEN Xinliang,ZHANG Cun-shan,LI Lin-na,ZHANG De-kun,SUN Jian,GENG Xin-hua,ZHAO Ying
DOI: https://doi.org/10.16136/j.joel.2011.04.008
2011-01-01
Abstract:Structural,optical and electrical properties of tungsten(W) and molybdenum(Mo) co-doped indium oxide(IMWO) films prepared by electron beam deposition technique with different WO3-MoO3 co-doped concentrations are investigated in detail.The IMWO thin films present pyramid-like surface.With the co-doped concentration increasing,the resistivity and carrier concentration become better.The lowest resistivity ρ~3.66×10-4 Ω·cm is obtained at the co-doped concentration ~1.0%,with the high mobility μ~45.5 cm2·V-1·s-1 and the carrier concentration n~3.74×1 020 cm-3.The optimized transmittance of IMWO films is ~76%(including float glass,i.e.,glass/IMWO) with the light wavelength between 400 nm and 1 100 nm.
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