A Study on the Gain Performance of SiC Ultraviolet Photodetectors at High Reverse Biased Voltage

HUANG Li-min,XIE Jia-chun,Liang Jin,SUN Teng-da
DOI: https://doi.org/10.3969/j.issn.1004-3365.2005.04.008
IF: 1.992
2005-01-01
Microelectronics Journal
Abstract:Au/n-4H-SiC Schottky ultraviolet photodetectors are fabricated using wide-band semiconductor n-4H-SiC and metal Au as Schottky contact and Ti,Ni,Ag alloys on the back side to form ohmic contact. The high gain of UV spectrum response of the device at high reverse biased voltage is measured and analyzed, which is about 3.8×104 at 150 V reverse voltage. The spectrum response and cut-off velocity of the detector increase sharply at high reverse biased voltage (above 100 V). And the spectrum response curves are very smooth between 260 nm and 380 nm. At 533 K without biased voltage, UV response of the device remains very good.
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