Towards the Fabrication and Measurement of High Sensitivity Sic-Uv Detectors with Oxide Ramp Termination

G Brezeanu,P Godignon,E Dimitrova,C Raynaud,D Planson,A Mihaila,F Udrea,J Milian,G Amaratunga,C Boianceanu
DOI: https://doi.org/10.4028/www.scientific.net/msf.457-460.1495
2004-01-01
Abstract:The paper is focused on the simulation, fabrication and measurement of the high UV detection performances of 6H-SiC pn photodiodes based on an efficient planar termination. The oxide ramp technology used for these photo-detectors is extensively presented. The OBIC technique was used for optical measurements of the samples. The impact of diode's bias as well as their photo-response on some incident light power values have been revealed by measurements and numerical simulations. The measurement shows a stronger bias effect on the diode optical properties than the simulation data.
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