UV Detection Properties of Epitaxial 6H-Sic Diodes with Oxide Ramp Termination

G Brezeanu,M Badila,P Godignon,J Millan,F Udrea,A Mihaila,G Amaratunga,J Rebollo,I Enache
DOI: https://doi.org/10.1109/smicnd.2001.967480
2001-01-01
Abstract:The simple planar edge termination with oxide ramp at the periphery of the contact is extended to SiC pn junction diodes. This paper focuses on the study of the UV detection performances of 6H-SiC Schottky and junction barrier diodes with oxide ramp termination by numerical MEDICI simulation. The devices show a high responsivity and quantum efficiency in the spectral range from 250 to 350 nm up to 800K. For transient photoresponse at a pulse light excitation we found that Schottky diodes are superior to pn diodes with the same parameters.
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