A Novel Flash Memory Using Band-to-Band Tunneling In duced Hot Electron Injection to Program

Liyang Pan,Jun Zhu,Zhihong Liu,Ying Zeng,Yong Lu
DOI: https://doi.org/10.3969/j.issn.1674-4926.2002.07.004
2002-01-01
Chinese Journal of Semiconductors
Abstract:A novel band-to-band hot electron programming fl ash memory device,which features programming with high speed,low voltage,low pow er consumption,large read current and short access time,is proposed.The new memo ry cell is programmed by band-to-band tunneling induced hot-electron (BBHE) i njection method at the drain,and erased by Fowler-Nordheim tunneling through th e source region.The work shows that the programming control gate voltage can be reduced to 8V,and the drain leakage current is only 3μA/μm.Under the proposed operating conditions,the program efficiency and the read current rise up to 4× 10-4 and 60μA/μm,respectively,and the program time can be as short as 16μs.
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