Novel flash memory using band-to-band tunneling induced hot electron injection to program

Liyang Pan,Jun Zhu,Zhihong Liu,Ying Zeng,Yong Lu
2002-01-01
Abstract:A novel band-to-band hot electron programming flash memory device, which features programming with high speed, low voltage, low power consumption, large read current and short access time, is proposed. The new memory cell is programmed by band-to-band tunneling induced hot-electron (BBHE) injection method at the drain, and erased by Fowler-Nordheim tunneling through the source region. The work shows that the programming control gate voltage can be reduced to 8 V, and the drain leakage current is only 3 μA/μm. Under the proposed operating conditions, the program efficiency and the read current rise up to 4×10-4 and 60 μA/μm, respectively, and the program time can be as short as 16 μs.
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