High Quality Metal-Quantum Dot-Metal Structure Fabricated with a Highly Compatible Self-Aligned Process

Fu Yingchun,Wang Xiaofeng,Ma Liuhong,Zhou Yaling,Yang Xiang,Wang Xiaodong,Yang Fuhua
DOI: https://doi.org/10.1088/1674-4926/36/12/123004
2015-01-01
Journal of Semiconductors
Abstract:A self-aligned process to fabricate a metal-quantum dot-metal structure is presented, based on anelectron beam lithography, thin film deposition and dry etching process. The sacrificial layers used can improve the lift-off process, and novel lithography layouts design can improve the mechanical strength of the fabricated nanostructures. The superiority of the self-aligned process includes low request for overlay accuracy, high compatibility with a variety of materials, and applicable to similar structure devices fabrication. Finally, a phase change memory with fully confined phase-change material node, with the length width height of 2554530 nm~3 was demonstrated.
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