All-Solution-Processed Electronics with Sub-Microscale Resolution and Nanoscale Fidelity Fabricated Via a Humidity-Controlled, Surface Energy-Directed Assembly Process

Jingwei Zhang,Guangji Wang,Zhimin Chai,Zetong Li,Siqing Yuan,Yihuan Wang,Yi Ding,Taohan Sun,Tongqing Wang,Dewen Zhao,Ahmed A. Busnaina,Tian-Ling Ren,Xinchun Lu
DOI: https://doi.org/10.1021/acsnano.4c04936
IF: 17.1
2024-07-14
ACS Nano
Abstract:Solution-based processes have received considerable attention in the fabrication of electronics and sensors owing to their merits of being low-cost, vacuum-free, and simple in equipment. However, the current solution-based processes either lack patterning capability or have low resolution (tens of micrometers) and low pattern fidelity in terms of line edge roughness (LER, several micrometers). Here, we present a surface energy-directed assembly (SEDA) process to fabricate metal oxide patterns...
materials science, multidisciplinary,chemistry, physical,nanoscience & nanotechnology
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