The Research and Design of Axial Symmetry Resonant MEMS Gyroscope

C. Wang,W. Zhang,J. Tang,Y. Liu,Y. Xing,F. Cui,W. Liu,Y. Cheng,W. Zhao,S. Li
DOI: https://doi.org/10.1142/9789813232808_0011
2018-01-01
Abstract:MEMS vibratory gyroscope has been widely used in military, automotive, and consumer electronics fields for its small size, low power consumption, high reliability, and impact resistance. Particularly, as one of the main directions of domestic and foreign research in the field of micro-gyroscope, the axial symmetry micro vibration gyroscope has higher quality factor, smaller frequency division and many other excellent characteristics. This paper gives a brief introduction of several typical structures of axial symmetry micro vibration gyroscope, then introduces the simulation and testing experiments of some axial symmetry micro vibration gyroscope we designed.
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