A Study of the Mechanical Effects in the Coupling Process of Excimer Laser Electrochemical Etching

Y-H. Long,Y-J. Xie,L-C. Xiong,X-Q. Yang,T-L. Shi

2015-01-01

Lasers in Engineering

Abstract:To explore further the characteristic of mechanical effects in the process of laser-induced electrochemical etching, the experiments of micromachining silicon by laser-induced electrochemical etching are carried out. This paper adopts a KrF excimer laser as the light source and uses KOH solution as the electrolyte By experiments and theoretical analysis, mechanical effects were studied in the process of high-energy and short pulse laser electrochemical etching; the removal mechanism of brittle materials by mechanical effects was analysed. The results show that mechanical effect is significant when high-energy and short-pulse laser interacting with substances in solution, and mechanical effects enhance the etching of brittle materials. By the study of mechanical effects when short-pulse excimer laser interacting with matter in liquid, the mechanism of laser electrochemical process was further understood.