Mirostructure fabrication and research used the excimer laser microprocessing

Leyan Wang,Chao Liu,Haijun Zhang
2007-01-01
Abstract:In this paper, we research the microstructure manufacture using KrF excimer laser (248 nm). Since the excimer laser works at the ultraviolet band, it has very high photon energy, which is higher than the bonding energy of most polymeric materials. When the laser irradiates on the material surface, the material will have chemical band rupture because of the absorption of photon energy. And therefore there will be traces formed on the material surface. Excimer laser microprocessing based on the above principle has a low cost and a rapid processing speed. It can achieve a high resolution and is especially fit for the processing of high polymers. In this paper, we etch various polymeric materials using the excimer laser, and discuss a-bout the proper manufacture parameters, such as repetition frequency, and the diameter of laser spot. Based on these research findings, we fabricate a combination-arm microactuator by the excimer laser microprocessing, and complete the photo-thermal driving experiments for the microactuator. The driving power is provided by a 650 nm laser, which works at 10 mW. According to the research results, the microstructures fabricated by the excimer laser microprocessing are smooth on their edges, and have high resolution. The photothermal microactuator has a simple structure, and is incidental to fabricate. It can be used as a light controlling commutation or other elements of MEMS.
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