Development of Research on Micromachining and Cladding Characteristics of Excimer Laser

An-feng ZHANG,Zhi-min ZHOU,Gang-xian ZHU,Jing-wen ZHANG,Bing-heng LU
DOI: https://doi.org/10.3969/j.issn.1000-8365.2007.09.033
2007-01-01
Abstract:Mechanism,characteristic and application of excimer laser micromachining are introduced.Excimer laser micromechaning has advantages of non-touching,selective processing,small heat affected zone,high precision and high repitition.Laser micro processing can be applied by either removing material or adding material to fabricate part.Cladding characteristics of excimer laser is discussed.The experimental results show that the excimer laser brings a very high power density instantly,thus has high temperature gradient.Interaction between light and heat occurs intensely in substrate surface;a tremendous light pressure and plasma are produced at the same time,so that large plasma particles are formed,which deposit around the melting pool.In addition,due to the pulse effect of excimer laser,the impact ripple in melting pool affects the surface quality of laser cladding layer.Laser parameters can be optimized to improve the surface quality of the cladding melting layer.
What problem does this paper attempt to address?