A Real Time Self-Temperature Compensation Method Used for MEMS Gyroscopes

Zishuai Ma,Anping Qiu,Qin Shi,Guoming Xia,Yang Zhao
DOI: https://doi.org/10.1063/1.5005260
2017-01-01
AIP Conference Proceedings
Abstract:This article presents a self-temperature compensation method used for MEMS gyroscopes. Drive frequency of gyroscope is employed as temperature compensation source, so that no external temperature sensor needed. When gyroscope starts to work, the circuit generates heat, providing the temperature input. Meanwhile, only 120 seconds is needed to calculate compensation parameters without pre-calibration. Therefore, the efficiency of experiment and study can be improved by this method.
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