Optimal ITO Transparent Conductive Layers for InGaN-based Amber/red Light-Emitting Diodes

Zhe Zhuang,Daisuke Iida,Pavel Kirilenko,Martin Velazquez-Rizo,Kazuhiro Ohkawa
DOI: https://doi.org/10.1364/oe.389725
IF: 3.8
2020-01-01
Optics Express
Abstract:Fabrication of indium tin oxide (ITO) was optimized for InGaN-based amber/red light-emitting diodes (LEDs). A radiofrequency sputtering reduced the sheet resistivity of ITO at low pressures, and a subsequent two-step annealing resulted in a low sheet resistivity (below 2×10-4 Ωcm) and high transmittance (over 98%) in the amber and red regions between 590 nm to 780 nm. Double ITO layers by sputtering could form an excellent ohmic contact with p-GaN. Application of the double ITO layers on amber and red LEDs enhanced light output power by 15.6% and 13.0%, respectively, compared to those using ITO by e-beam evaporation.
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