Reduction of Saturation Voltage in InGaAs-Channel/lnGaN-Drain Vertical FETs and the Role of Traps at the InGaAs/lnGaN Junction

Shalini Lal,Jing Lu,Brian J. Thibeault,Man Hoi Wong,Chris G. Van de Walle,Steven P. DenBaars,Umesh K. Mishra
DOI: https://doi.org/10.1109/drc46940.2019.9046446
2019-01-01
Abstract:Wafer-bonded current aperture vertical electron transistors (BAVETs) aim to eliminate the present bottleneck of simultaneously achieving high frequency and high breakdown. BAVETs enable novel transistors with a high mobility III-As (mobility = 12000 cm 2 V -1 S -1 ) channel, and a wide-bandgap III-N (breakdown field = 3.3MV.cm- 1 ) drift region. A BAVET device, based on a current aperture vertical electron transistor (CA VET), comprises source contacts to n-doped In 0.53 Ga 0.47 As channel, with In 0.52 Al 0.48 As as the gate barrier, InGaN/GaN layers for the drift region, and n+GaN as the drain-contact layer (Fig. 1) [1]. The on-state DC performance in a BAVET has been traditionally affected by abnormally high on-current-saturation voltage, (Fig. 2) [2]-[4]. Herein, we investigate the cause of this abnormality and report a significant reduction in VDS-SAT(5V).
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