Abstract:Carbon nanotubes (CNT) have been developed in recent decades for nanodevices such as nanoradios, nanogenerators, carbon nanotube field effect transistors (CNTFETs) and so on, indicating that the application of CNTs for nanoscale electronics may play a key role in the development of nanotechnology. Nanorobotics manipulation systems are a promising method for nanodevice construction and assembly. For the purpose of constructing three-dimensional CNTFETs, a nanorobotics manipulation system with 16 DOFs was developed for nanomanipulation of nanometer-scale objects inside the specimen chamber of a scanning electron microscope (SEM). Nanorobotics manipulators are assembled into four units with four DOFs (X-Y-Z-θ) individually. The rotational one is actuated by a picomotor. That means a manipulator has four DOFs including three linear motions in the X, Y, Z directions and a 360-degree rotational one (X-Y-Z-θ stage, θ is along the direction rotating with X or Y axis). Manipulators are actuated by picomotors with better than 30 nm linear resolution and <1 micro-rad rotary resolution. Four vertically installed AFM cantilevers (the axis of the cantilever tip is vertical to the axis of electronic beam of SEM) served as the end-effectors to facilitate the real-time observation of the operations. A series of kinematic derivations of these four manipulators based on the Denavit-Hartenberg (D-H) notation were established. The common working space of the end-effectors is 2.78 mm by 4.39 mm by 6 mm. The manipulation strategy and vision feedback control for multi-manipulators operating inside the SEM chamber were been discussed. Finally, application of the designed nanorobotics manipulation system by successfully testing of the pickup-and-place manipulation of an individual CNT onto four probes was described. The experimental results have shown that carbon nanotubes can be successfully picked up with this nanorobotics manipulation system.

Cooperative Carbon Nanotube Nanomanipulation for Field Effect Transistor.

Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly

Nanorobotic manipulation of carbon nanotubes inside a transimission electron microscope

Carbon Nanotube Lateral Field Emission Device with Embedded Field Effect Transistor

Nanoelectromechanical Switches with Vertically Aligned Carbon Nanotubes

Self-aligned Split Gate Electrodes Fabricated on Suspended Carbon Nanotubes

Fabrication of A Nanoelectromechanical Switch Using A Suspended Carbon Nanotube

Characterization of the Resistance and Force of a Carbon Nanotube/Metal Side Contact by Nanomanipulation

Using Nanoscale Thermocapillary Flows to Create Arrays of Purely Semiconducting Single-Walled Carbon Nanotubes

Manipulation and Cutting of Carbon Nanotubes

Fabrication of Carbon Nanotubes on Interdigitated Metal Electrode for Switchable Nanophotonic Devices

Self-aligned Electrodes for Suspended Carbon Nanotube Structures

Mechanism-Independent Manipulation of Single-Wall Carbon Nanotubes with Atomic Force Microscopy Tip

Transformation of unipolar single-walled carbon nanotube field effect transistors to ambipolar induced by polystyrene nanosphere assembly.

Manipulation of Metallic and Semiconducting Nanowires with FETEM

Manufacturing Structures in Nanometer Scale by Nanomanipulation

Direct Growth of Horizontally Aligned Carbon Nanotubes Between Electrodes and Its Application to Field-Effect Transistors

Engineering Multiwalled Carbon Nanotubes Inside a Transmission Electron Microscope Using Nanorobotic Manipulation

Recent Advances in Nanorobotic Manipulation Inside Scanning Electron Microscopes

Transfer printing approach to all-carbon nanoelectronics

Fabrication of Carbon Nanotube Diode with Atomic Force Microscopy Manipulation