Transfer printing approach to all-carbon nanoelectronics

V.K. Sangwan,A. Southard,T.L. Moore,V.W. Ballarotto,D.R. Hines,M.S. Fuhrer,E.D. Williams
DOI: https://doi.org/10.1016/j.mee.2011.06.017
IF: 2.3
2011-10-01
Microelectronic Engineering
Abstract:Transfer printing methods are used to pattern and assemble monolithic carbon nanotube (CNT) thin-film transistors on large-area transparent, flexible substrates. Airbrushed CNT thin-films with sheet resistance 1kΩsq−1 at 80% transparency were used as electrodes, and high quality chemical vapor deposition (CVD)-grown CNT networks were used as the semiconductor component. Transfer printing was used to pre-pattern and assemble thin film transistors on polyethylene terephthalate (PET) substrates which incorporated Al2O3/poly-methylmethacrylate (PMMA) dielectric bi-layer. CNT-based ambipolar devices exhibit field-effect mobility in range 1–33cm2/Vs and on/off ratio ∼103, comparable to the control devices fabricated using Au as the electrode material.
engineering, electrical & electronic,nanoscience & nanotechnology,optics,physics, applied
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