Abstract:Carbon nanotubes (CNT) have been developed in recent decades for nanodevices such as nanoradios, nanogenerators, carbon nanotube field effect transistors (CNTFETs) and so on, indicating that the application of CNTs for nanoscale electronics may play a key role in the development of nanotechnology. Nanorobotics manipulation systems are a promising method for nanodevice construction and assembly. For the purpose of constructing three-dimensional CNTFETs, a nanorobotics manipulation system with 16 DOFs was developed for nanomanipulation of nanometer-scale objects inside the specimen chamber of a scanning electron microscope (SEM). Nanorobotics manipulators are assembled into four units with four DOFs (X-Y-Z-θ) individually. The rotational one is actuated by a picomotor. That means a manipulator has four DOFs including three linear motions in the X, Y, Z directions and a 360-degree rotational one (X-Y-Z-θ stage, θ is along the direction rotating with X or Y axis). Manipulators are actuated by picomotors with better than 30 nm linear resolution and <1 micro-rad rotary resolution. Four vertically installed AFM cantilevers (the axis of the cantilever tip is vertical to the axis of electronic beam of SEM) served as the end-effectors to facilitate the real-time observation of the operations. A series of kinematic derivations of these four manipulators based on the Denavit-Hartenberg (D-H) notation were established. The common working space of the end-effectors is 2.78 mm by 4.39 mm by 6 mm. The manipulation strategy and vision feedback control for multi-manipulators operating inside the SEM chamber were been discussed. Finally, application of the designed nanorobotics manipulation system by successfully testing of the pickup-and-place manipulation of an individual CNT onto four probes was described. The experimental results have shown that carbon nanotubes can be successfully picked up with this nanorobotics manipulation system.

Nanorobotic manipulation of carbon nanotubes inside a transimission electron microscope

Engineering Multiwalled Carbon Nanotubes Inside a Transmission Electron Microscope Using Nanorobotic Manipulation

Manipulation and Cutting of Carbon Nanotubes

High-Resolution Transmission Electron Microscopy Imaging Of Carbon Nanostructures

Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly

Facile manipulation of individual carbon nanotubes assisted by inorganic nanoparticles.

In situ measurements on individual thin carbon nanotubes using nanomanipulators inside a scanning electron microscope

On the Applicability of Carbon Nanotubes As Nanomechanical Probes and Manipulators.

Mechanism-Independent Manipulation of Single-Wall Carbon Nanotubes with Atomic Force Microscopy Tip

Manipulation of Ultralong Single-Walled Carbon Nanotubes at Macroscale

Molecular Dynamics Simulations of the Morphology Transformations in Unzipped Carbon Nanotubes

Manufacturing Structures in Nanometer Scale by Nanomanipulation

CHARACTERIZATION AND MANIPULATION OF NANOSTRUCTURES BY A SCANNING TUNNELING MICROSCOPE

Controlled Growth of a Single Carbon Nanotube on an AFM Probe

Optical Visualization of Individual Ultralong Carbon Nanotubes by Chemical Vapour Deposition of Titanium Dioxide Nanoparticles

Nanorobotic Spot Welding by Attogram Precision Metal Deposition from Copper-filled Carbon Nanotubes.

In situ transmission electron microscope studies on one-dimensional nanomaterials: Manipulation, properties and applications

Single-Carbon-Nanotube Manipulations and Devices Based on Macroscale Anthracene Flakes

Micro-mechanical Analysis of Dynamic Processes of Nanomanipulation

Metal-filled Carbon Nanotubes for Nanomechatronics

Electron Beam Interaction with Carbon Nanotubes in Scanning Electron Microscope: Mechanisms and Applications