Abstract:Abstract MEMS inductors are used in a wide range of applications in micro- and nanotechnology, including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies set the boundary conditions for inductor design and their electrical and mechanical performance. This review provides a comprehensive overview of state-of-the-art MEMS technologies for inductor fabrication, presents recent advances in 3D additive fabrication technologies, and discusses the challenges and opportunities of MEMS inductors for two emerging applications, namely, integrated power electronics and neurotechnologies. Among the four top-down MEMS fabrication approaches, 3D surface micromachining and through-substrate-via (TSV) fabrication technology have been intensively studied to fabricate 3D inductors such as solenoid and toroid in-substrate TSV inductors. While 3D inductors are preferred for their high-quality factor, high power density, and low parasitic capacitance, in-substrate TSV inductors offer an additional unique advantage for 3D system integration and efficient thermal dissipation. These features make in-substrate TSV inductors promising to achieve the ultimate goal of monolithically integrated power converters. From another perspective, 3D bottom-up additive techniques such as ice lithography have great potential for fabricating inductors with geometries and specifications that are very challenging to achieve with established MEMS technologies. Finally, we discuss inspiring and emerging research opportunities for MEMS inductors.

3D MEMS In-Chip Solenoid Inductor with High Inductance Density for Power MEMS Device

A Solenoid-Type Inductor Fabricated by MEMS Technique

On-chip Vertical Tapered Solenoid Inductor with High Self-Resonance Frequency

3-D Microinductor Fabricated by Using MEMS Technology

Design of a Novel High Q On-Chip Non-solenoid MEMS Inductor

Design and Optimization of A Novel Solenoid Microinductor with Magnetic Core Material

Simulation and Optimization of High Performance On-Chip Solenoid MEMS Inductor

The simulation study of high-performance micro-inductors Based on MEMS 3D coils

Design and Simulation of Si-Based MEMS Inductor

Novel MEMS-based Fabrication Technology of Micro Solenoid-Type Inductor

High-Performance 3-D Silicon-Embedded Coupled Solenoid Inductors With Inserted Magnetic Core

Broadband Lumped-Element Parameter Extraction Method of Two-Port 3D MEMS In-Chip Solenoid Inductors Based on a Physics-Based Equivalent Circuit Model

Ferrite-integrated On-Chip RF Solenoid Inductor

Design and Simulation of a CMOS Integrated MEMS On-chip Spiral Inductor

SU-8 enhanced high power density MEMS inductors

Experimental Characterisation Of On-Chip Octagonal Double-Helix Inductors On Silicon Substrates

MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

On-Chip Solenoid Power Inductors with Nanogranular Magnetic Cores

MEMS-based Fabrication of High-Performance Inductors with Back Hollow Structure and Ferromagnetic Film

A MEMS Spiral Power Inductor with A Magnetic Core for DC-DC Converters

Embedded Magnetic Solenoid Inductor into Organic Packaging Substrate Using Lithographic Via Technology for Power Supply Module Integration