Abstract:With the rapid evolution of synchrotron x-ray sources, the demand for high-quality precision x-ray mirrors has greatly increased. Single nanometer shape accuracy is required to keep imaging capabilities at the diffraction limit. Ion beam figuring (IBF) has been used frequently for ultra-precision finishing of mirrors, but achieving the ultimate accuracy depends on three important points: careful alignment, accurate dwell time calculation and implementation, and accurate optical metrology. The Optical Metrology Group at National Synchrotron Light Source II has designed and built a position-velocity-time-modulated two-dimensional IBF system (PVT-IBF) with three novel characteristics: (1) a beam footprint on the mirror was used as a reference to align the coordinate systems between the metrology and the IBF hardware; (2) the robust iterative Fourier transform-based dwell time algorithm proposed by our group was applied to obtain an accurate dwell time map; and (3) the dwell time was then transformed to velocities and implemented with the PVT motion scheme. In this study, the technical aspects of the PVT-IBF systems are described in detail, followed by an experimental demonstration of the figuring results. In our first experiment, the 2D RMS in a $ 50\;{\rm mm} \times 5\;{\rm mm} $50mm×5mm clear aperture was reduced from 3.4 to 1.1 nm after one IBF run. In our second experiment, due to a 5 mm pinhole installed in front of the source, the 2D RMS in a $ 50\;{\rm mm} \times 5\;{\rm mm} $50mm×5mm clear aperture was reduced from 39.1 to 1.9 nm after three IBF runs, demonstrating that our PVT-IBF solution is an effective and deterministic figuring process.

Stitching Interferometry for Synchrotron Mirror Metrology at National Synchrotron Light Source II (NSLS-II)

Nano-precision metrology of X-ray mirrors with laser speckle angular measurement

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Optical Design and Fabrication of the off Axis Paraboloid and Ellipsoidal Mirrors of Beam Line for Synchrotron Radiation Biological Spectroscopic Experiments

Multi-pitch Nano-Accuracy Surface Profiler for Strongly Curved X-ray Mirror Metrology

Stitching interferometry for long X-ray mirrors with lateral multi-shift-based absolute calibration

Aspheric Subaperture Stitching Based on System Modeling.

Surface Form Metrology of Micro-Optics

Influence of Alignment Error and Random Noise on Interferometry Flat Sub-Aperture Stitching

X-ray microscopy instrumentation developments at NSLS-II: recent progress and future directions

Repeatability Analysis of One-Dimensional Angular-Measurement-based Stitching Interferometry.

In Situ Metrology for Adaptive X-Ray Optics with an Absolute Distance Measuring Sensor Array

Measurement Uncertainty of Highly Asymmetrically Curved Elliptical Mirrors Using Multi-Pitch Slope Stitching Technique

X-Ray Optics R&D At Nslsii Focus On Optical Metrology Development

Multi-pitch Self-Calibration Measurement Using a Nano-Accuracy Surface Profiler for X-ray Mirror Metrology.

Development of a Position-Velocity-time-modulated Two-Dimensional Ion Beam Figuring System for Synchrotron X-Ray Mirror Fabrication

Subaperture moving strategy and related systematic errors in stitching interferometry of X-ray mirrors

One-dimensional Stitching Interferometry Assisted by a Triple-Beam Interferometer.

Two-dimensional Stitching Interferometry Based on Tilt Measurement.

Interferometric Measurement of Freeform Surfaces Using Irregular Subaperture Stitching

A method to specify X-ray mirrors for nanoprobe beamlines